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      Z514, Z524 DevicenetTM
      Mass Flow Controller / Meter
      Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX
      Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX
      Full-scale flow rate MR/MG number
      (N2 conversion flow rate) #R01:10SCCM
      Valve Type
      Flow rate at fully closed control valve
      Flow rate control range
      Flow rate measuring range (SEF)
      Operating temperature
      50 to 300 kPa (d)
      #5.5, #06: 100 to 300 kPa (d)
      Operating differential pressure (SEF)
      MAX. Operating pressure
      Pressure resistance
      Leak Integrity
      Digital interface
      Wetted materials
      Power supply
      1/4 inch VCR equivalent
      Option: 1.125 inch IGS
      Mounting orientation
      *1 The gas type and full scale settings for the SEC(SEF)-Z514MGX and Z524MGXN can be changed by
      the operator, using special software.
      *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
      associated with the full-scale MR and MG number values.
      *3 IGS: Integrated Gas System
      * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
      ≤ 2% F.S.
      2-100% of F.S.
      0-100% of F.S.
      ≤ 1 second: Over full flow rate range
      ≤ ±0.5% F.S.
      ≤ ±0.2% F.S.
      ±0.25% F.S. (Flow rate ≤ 25% F.S.)
      Conforming to ODVA standards, DC 24 V, 4.0 VA
      Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
      ≤ 300 kPa (d)
      ≤ 5 x 10-12Pa·m3/s (He)
      DeviceNet? Protocol
      316L Stainless Steel (polished surface)
      Standard Fitting *3 1/4 inch VCR equivalent 1.5 inch IGS
      Option: 1.125 inch IGS, 1.5 inch IGS
      MR/MG number
      O: Normally open C: Normally closed
      Accuracy *2 ±1.0%F.S. ±1.0% S.P. (Flow rate > 25% F.S.)
      5 to 50°C (recommended temperature range: 15 to 45°C)
      Z514/524 Web Ver.001
      Subject to change without notice.

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